ULVAC VACUUM > Other Vacuum Parts > Each Feedthroughs > CMS Series Electrical Feedthroughs
CMS Series Electrical Feedthroughs
The CMS Series are electrical feedthroughs for passing current and applying voltage to vacuum chambers with pressures ranging from atmospheric pressure to ultra-high vacuums.
- • Can be used with pressures ranging from 10-2 Pa to ultra-high vacuums.
• Several models are available, ranging from types for microcurrents (with BNC connectors), to types for large currents (400 A) and high voltages (12 kV).
• Outstanding heat resistance and low gas emission, ideal for use with ultra-high vacuums.
• Ceramic and copal materials have similar thermal expansion coefficients, so seals don't leak during bake-out and other processes with temperature variations.
• Connected electrodes are fixed in place by screws (except for some models), so wiring remains securely in place.
- • Passing current/applying voltage to ultra-high vacuum systems
| Operating pressure range |
10-2 Pa to ultra-high vacuum pressure |
| Permitted bake-out temperature | 300ºC max. |
| Temperature variation ratio | 25ºC/minute max. |
| Permitted leak rate | 1.3 x 10-11 Pa·m3/s max. |
CAD data Download
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Downloading is only available if you have completed User Registration (free).
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>> Caution <<
*This download system can be used with the common ID and password for ULVAC's website ulvac.co.jp/eng/.
* If you do not receive your password within 1 hour, please try registering again.
Please note that IDs and passwords are subject to change without notice.
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fully compatible, there may be problems such as garbled characters or layout misalignments.
* Due to product improvements, CAD data is subject to change without notice.
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