ULVAC VACUUM > Power Supplies > Dc Power Supplies > DCL Series DC Power Supplies for Sputtering
DCL Series DC Power Supplies for Sputtering
ULVAC new DCL Series are DC power supplies for sputtering that come with the world's highest level of arc energy reduction as a standard function. This function enables them to minimize the energy emitted by abnormal discharges. The series is low-priced, and comes with other outstanding functions, including a high-speed control function, a wide range of output control functions, and communication functions.
- • Ultra-low arc energy
• High-speed control
• Wide range of output control functions
• Large-capacity output of up to 100 kW
• Lower ripple
• Improved maintenance
• Can be combined with A2K.
- • DC power supplies for Al, Ni and other metal sputtering processes; DC power supplies for bias processes
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| Model | DCL100 Dual | DCL600 | DCL1000 | |
| Maximum output power | 1kW /1kW | 6kW | 10kW | |
| Output range | Tap 1 | -500 to -1000V 2 to 1A |
-500 to -1000V 12 to 6A |
-500 to -1000V 20 to 10A |
| Tap 2 | -250 to -500V 4 to 2A |
-250 to -500V 24 to 12A |
-250 to -500V 40 to 20A |
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| Number of outputs | 2 | 1 | 1 | |
| External dimensions (W x D x H; mm) |
480 x 550 x 149 | |||
| Weight | 17.5kg | 21kg | 22kg | |
