ULVAC VACUUM > Power Supplies > Dc Power Supplies > DCS series DC Power Supplies

DCS series DC Power Supplies

Adobe Acrobat Reader(Ver.6 or a later version)is required to open PDF files.

As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications. Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.

• Improvement in output regulation (Operates in 1% to 100% of rated)

• Wide range of output without tap changing

• Two types of arc detection function are equipped

• Countermeasure for extraneous noise by isolation (option)

• Selectable from three types of operation mode (power / current / voltage)

• Floating output up to +100V

• For Al, Ni and other metal sputtering processes

• Power supply for bias

DCS Series
Model		DCS0052B	DCS0202B	DCS0402B
Maximum output power		500W	2kW	4kW
Output range	Power	5W to 500W	20W to 2000W	40W to 4000W
	Voltage	80V to 800V
	Current	0.0012A to 1.25A	0.005A to 5A	0.1A to 10A
External dimensions (WDH) mm		240 x 450 x 99	480 x 430 x 124
Weight		9kg	22kg