ULVAC VACUUM > Power Supplies > Eb Power Supplies > HPS Series EB Power Supplies
HPS Series EB Power Supplies
The HPS series are power supplies for electron beam evaporation. They can be used together with the EGL Series or other electron guns, for stable evaporation.
- • Function for minimizing deposition rate drop during abnormal discharges
• Can be used to control deposition when combined with CRTM or other deposition controllers.
• HPS-1000 and HPS-1600 models can supply power to up to 2 evaporation sources.
- • EB power supplies for vacuum evaporation and ion plating
| HPS-510S | HPS-1000S | HPS-1000G | HPS-1600F | ||
| Application | Metal | Metal | Optical | Metal / Optical | |
| High voltage output | Voltage | -4 to -10kV | |||
| Current | 0 to 0.5A | 0 to 1A | 0 to 1A | 0 to 1.6A | |
| External dimensions (W x D x H ; mm) |
Power supply | 480 x 620 x 300 | 500 x 700 x 710 | 500 x 700 x 710 | |
| Controller | Built into power supply |
480 x 480 x 149 | 480 x 480 x 149 | ||
| Weight | Power supply | 47kg | 104kg (when 1 sources are in use) |
127kg (when 1 sources are in use) |
|
| Controller | 20kg | 18kg | 21kg | ||
