ULVAC VACUUM > Power Supplies > Eb Power Supplies > EGK/EGL/EGO Series EB gun for vacuum evaporation
EGK/EGL/EGO Series EB gun for vacuum evaporation
ULVAC EB guns for electron beam evaporation all use magnetic field deflection, and are structured to minimize contamination from the evaporated material. A wide lineup of models is available. The EGK Series is designed for low-capacity research applications, the EGL Series is for metal film production, and the EGO Series is for optical film production.
- • EGK/EGL models are ideal for metal evaporation.
• EGL models and EGO models are deflected 270‘® to eliminate filament contamination.
• EGL models have high crucible cooling performance, and a structure that minimizes contamination.
• EGO models have high-speed sweep and vertical incidence, ideal for use with oxide and compound evaporation.
- • Evaporation sources for electron beam evaporation
| EB guns for metal films | |||||||
| Crucible capacity | |||||||
| 3cc | 10cc | 20cc | 40cc | 110cc | 180cc | ||
| Quantity of crucibles | 1 | EGK-3 | EGL-35 | EGL-110 | EGL-180 | ||
| 3 | EGL-103S * 1 |
EGL-203S * 1 |
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| 4 | EGK-3M | EGL-35M * 2 |
EGL-35M *2 |
EGL-80M | EGL-180M | ||
| 6 | EGL-206M | EGL-406M | |||||
| *1 | For ultra-high vacuums |
| *2 | Standard type has two 10 cc crucibles and two 40 cc crucibles. |
| EB guns for optical films | |||||
| Crucible capacity | |||||
| 10cc | 20cc | 40cc | 110cc | ||
| Quantity of crucibles | 4 | EGO-40M *1 | EGO-40M *1 | EGO-110M | |
| 6 | EGO-206M | ||||
| *1 | Standard type has two 10 cc crucibles and two 40 cc crucibles. |
