ULVAC VACUUM > Vacuum Gauges > Hot Cathode Gauges > G-Tran Series Hot Cathode Gauge Box Unit
G-Tran Series Hot Cathode Gauge Box Unit
 |
||||
|
||||
|
The G-Tran Series contains a hot cathode gauge measurement unit (a box unit (BMR2)). The gauge head and circuit are separate, enabling gauge head baking. An RS-485 interface is also provided.
- • Output of pseudo-logarithmic signals and set points (2 points)
• RS-485 communication (supports multi-drop)
• Gauge head can be easily replaced.
• Enables gauge head baking.
- • Process control for equipment for manufacturing semiconductors or other electronic parts
• Process control for furnaces and other industrial equipment
• Process control for manufacturing equipment with several process chambers (such as inline or single-wafer systems)
| Name | Box unit |
| Model | BMR2 |
| Compatible gauge heads | M-11, M-12, M-13, M-14, M-15 |
| Measured pressure range (Pa) | 5.0 x 10-8 to 9.9 |
| Measurement precision | ±20% (±15% gauge head interchangeability) |
| Operating temperature range (ºC) | 10 to 40 |
| Recorder output | Pseudo-logarithmic output: 0 to 10 VDC (1 V linear output for each digit) |
| Control input signal (open collector) |
FIL ON/OFF, FIL 1/2, DEGAS ON/OFF |
| Control output signal | Pressure protection, set points 1/2, EMISSION VALID |
| LED display | Power, filament, pressure protection, DEGAS, set points 1/2 |
| Communication type | RS-485 |
| Power supply | DC24V±2V, 1.2A(MAX) |
| I/O connector | D-sub, 15 sockets, M2.6 screw |
| Gauge weight (g) | 800 |
| Options | Gauge head, gauge head cable for box unit |
CAD data Download
At ULVAC, you can download CAD data (DXF files) for some of our products.(Internet Explorer Ver. 5.5 or newer)
Downloading is only available if you have completed User Registration (free).
Adobe Acrobat Reader (Ver.6 or a later version)is required to open PDF files.
Once we have received your registration, we will send you a password by email.
>> Caution <<
*This download system can be used with the common ID and password for ULVAC's website ulvac.co.jp/eng/.
* If you do not receive your password within 1 hour, please try registering again.
Please note that IDs and passwords are subject to change without notice.
If you are unable to access the download area with an ID and password
that you received in the past, please complete User Registration again to get your updated ID and password.
* Please note that DXF files and PDF files contain Japanese characters. Please also note that, depending on the PC/CAD environment,
files may not open, be displayed or be able to be used correctly.
* Please note that, because the conversion to DXF format is not
fully compatible, there may be problems such as garbled characters or layout misalignments.
* Due to product improvements, CAD data is subject to change without notice.
* ULVAC will not assume any responsibility whatsoever for any direct or indirect damages resulting from the use of this data.
