ULVAC VACUUM > Vacuum Pumps > Titanium Getter Pumps > PGT Series Titanium Getter Pumps
PGT Series Titanium Getter Pumps
ULVAC's titanium getter pumps (PGT Series) and power supplies for titanium getter pumps (GGT Series) are units for passing current directly through titanium alloy in a vacuum to sublimate it. The sublimated titanium creates a large-volume activated metal surface on the surrounding walls, and chemically activated gas is adsorbed and evacuated.
- • Selecting the proper adsorption surface area for the sublimated titanium can produce a high evacuation speed and improve the final pressure characteristic.
• The connection flanges have knife-edge metal seals enabling bake-out at up to 250ºC.
• The component materials have all been surface-processed for ultra-high vacuums.
- As main evacuation pumps
for ultra-high vacuum equipment(Used in combination with sputter ion pumps or turbomolecular pumps.)
| Model |
PGT-3F |
PGT-6F |
| Evacuation speed (*1) | 24m3/(Sm2) <20ºC>/64m3/(Sm2)
<-196ºC> |
|
| Operating pressure range | Ultra-high vacuum of between 10-1 to 10-9Pa |
|
| Gases that can be evacuated | H2, N2, O2, H2O, CO, CO2 |
|
| Gases that can't be evacuated | He, Ne, Ar, CH4, C2H6 and other organic
gases |
|
| Leak volume | 1.3 x 10-11Pa•m3/s
max. |
|
| Maximum bake-out temperature | 250ºC |
|
| Required power | 270W |
|
| Filament material | Titanium alloy |
|
| Filament life | Rated continuous operation time (*2)
: About 75 hours/filament; Continuous ON time : About 25 hours/filament |
|
| Number of filaments | 3 |
6 |
| Connection flange (*3) | UFC070-FH |
UFC114-FH |
| Weight | 1.0kg |
2.5kg |
| Power supply model used with | GGT-3 |
|
*1 Calculated value for ultra-high vacuum pressure range, 20ºC, N2
*2 ON for 30 seconds at 270 W, OFF for 60 seconds
*3 ULVAC standard stainless steel knife-edge metal seal flanges
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