ULVAC VACUUM > Vacuum Pumps > Oil Diffusion Pumps > ULK Series Oil Diffusion Pumps
ULK Series Oil Diffusion Pumps
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ULVAC has drawn on a wealth of experience in evacuation technology to redesign the ULK Series of oil diffusion pumps to meet the demands of a new era. These pumps have been designed for outstanding performance and extremely low running costs.
- • Designed for large critical back-pressure
• Extremely stable performance at pressures down to 10-2Pa (10-4torr)
• Use hose flanges (except for vent flanges on ULK-04A and 06A)
• Pumps can be cleaned easily (parts can be disassembled easily).
• Come with mechanism to stop flow of operating fluid to auxiliary pump.
| Model
Specification |
ULK-04A | ULK-06A | |||
| Operating fluid |
ULVOIL D-11 |
ULVOIL D-31 |
ULVOIL D-11 |
ULVOIL D-31 |
|
| Final pressure |
Pa | <2.6 x 10-5 | <2.6 x 10-6 | <2.6 x 10-5 | <2.6 x 10-6 |
| Critical back-pressure |
Pa | 40 | 60 | 40 | 60 |
| Evacuation speed |
L/s | 550 | 500 | 1200 | 1100 |
| Maximum evacuation capacity |
Pa·m3/s | 0.086 | 0.13 | 0.15 | 0.20 |
| Operation startup time |
min | 9.0 | 8.5 | 16.5 | 15 |
| Required power (*1) |
KW | 0.55 | 0.73 | 0.90 | 1.2 |
| Operating fluid volume |
L | 0.15 | 0.15 | 0.35 | 0.35 |
| Cooling water flow rate (*2) |
L/min | 1.0 | 1.0 | 1.0 | 1.5 |
| Auxiliary pump | D-330K, D-240DK, PVD-180 |
D-950K, D-650K, D-330K, VD-301, VD401 |
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| Model
Specification |
ULK-10A | ULK-14A | |||
| Operating fluid |
ULVOIL D-11 | ULVOIL D-31 | ULVOIL D-11 |
ULVOIL D-31 |
|
| Final pressure |
Pa | <2.6 x 10-5 | <2.6 x 10-6 | <2.6 x 10-5 | <2.6 x 10-6 |
| Critical back-pressure |
Pa | 35 | 40 | 31 | 40 |
| Evacuation speed |
L/s | 3400 | 3000 | 5400 | 4900 |
| Maximum evacuation capacity |
Pa·m3/s | 0.35 | 0.43 | 0.35 | 0.47 |
| Operation startup time |
min | 20 | 20 | 24 | 25 |
| Required power (*1) |
KW | 2.0 | 2.4 | 2.25 | 3.15 |
| Operating fluid volume |
L | 0.8 | 0.8 | 1.5 | 1.5 |
| Cooling water flow rate (*2) |
L/min | 2.5 | 3.0 | 2.5 | 3.5 |
| Auxiliary pump | VS1501, PKS-030, PKS-016, EC803 |
VS1501, VS2401, PKS-030 |
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| *1 | Specify the supply voltage when ordering. |
| *2 | Cooling water temperature : 19ºC (inlet), 29ºC (outlet) |
| Model
Specification |
ULK- 04A |
ULK- 06A |
ULK- 10A |
ULK- 14A |
|
| External dimensions |
A (mm) | 175 | 250 | 340 | 340 |
| B (mm) | 150 | 180 | 240 | 240 | |
| H (mm) | 341 | 449 | 650 | 670 | |
| Intake | Flange type | VG100 size |
VG150 size |
VG250 size |
VG350 size |
| Outer diameter (mm) |
185 | 235 | 350 | 450 | |
| Bolt holes (number- diameter) (mm) |
8-12 (diameter) | 8-12 (diameter) | 12-15 (diameter) | 12-15 (diameter) | |
| P.C.D (mm) | 160 | 210 | 320 | 420 | |
| Gasket groove dimensions (mm) (inner diameter x width x depth) |
120 x 4 x 3 |
175 x 4 x 3 |
275 x 7.5 x 4.2 |
380 x 7.5 x 4.2 |
|
| Gasket dimensions * (mm) (inner diameter x width x depth) |
120 x 4 x 4 |
175 x 4 x 4 |
275 x 8 x 8 |
380 x 8 x 8 |
|
| Vent | Flange type | VG25 size |
VG40 size |
VG80 size |
VG80 size |
| Outer diameter (mm) |
90 | 105 | 160 | 160 | |
| Bolt holes (number- diameter) (mm) |
4-10 (diameter) |
4-10 (diameter) |
4-12 (diameter) |
4-12 (diameter) |
|
| P.C.D (mm) |
70 | 85 | 135 | 135 | |
| Gasket groove dimensions (mm) (inner diameter x width x depth) |
40 x 5 x 3 |
55 x 5 x 3 |
100 x 5 x 2.8 |
100 x 5 x 2.8 |
|
| Gasket dimensions* (mm) (inner diameter x width x depth) |
V40 | V55 | V100 | V100 | |
| Cooling water hose opening |
Rc1/4 (PT1/4) |
Rc1/4 (PT1/4) |
Rc3/8 (PT3/8) |
Rc3/8 (PT3/8) |
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| Material | Pump case | SUS | |||
| Nozzle | Al | ||||
| Cooling method |
Water-cooled by coil hose |
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| Oil level gauge |
No | No | Available as option |
Yes | |
| Weight (kg) | 7.5 | 13.5 | 47 | 56 | |
| Packaging dimensions (H x D x W) (mm) |
550 x 330 x 400 |
580 x 420 x 580 |
730 x 550 x 700 |
750 x 550 x 700 |
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| Packaging weight (kg) |
10.5 | 17.5 | 54 | 64 | |
| * | NBR intake/vent gaskets are provided as standard accessories. If pressures under 10-5 Pa (10-7 torr) will be required, specify fluororubber gaskets. |
