ULVAC VACUUM > Vacuum Pumps > Turbo Molecular Pumps > UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
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ULVAC's UTM-FW/FH Series of turbo molecular pumps use digitally-controlled magnetic levitation to achieve superior features such as high functionality and energy-savings. The wide variety of models in each series can be used for several different processes. The FW Series is for wide range and high throughput. The FH Series is for high back-pressures and high compression.
- • Come with monitoring/self-check and communication functions providing digital output enabling use with centralized control systems.
• Come with coupling-free function. Several pump models can be registered and used with a single power supply, switching models to combine the power supply with different pumps.
• Come with a variable speed function enabling evacuation speed to be varied from 25 to 100%.
• Surface-processed for outstanding corrosion resistance. For hard processes, models are available with specially processed surfaces and internal heating systems (FW Series).
• Designed for a high degree of safety, with a mechanism to absorb rupture energy, reducing equipment damage during accidents.
- • As main pumps for middle to hard processes (FW Series)
• As main pumps for light to middle processes (FH Series)
• As main pumps for evacuation to create high to ultra-high vacuums for laboratory equipment.
| Wide range and high throughput models | High back-pressure and high compression models | Inlet flange size | N2 pumping speed (l/s) (*1, *2) |
| UTM-3301FW | UTM-3302FH | JIS VG350 | 3300 |
| UTM-2300FW | - | JIS VG300 | 2730 |
| JIS VG250 | 2230 | ||
| ICF305 | 2110 | ||
| UTM-1400FW | - | JIS VG250 | 1490 |
| JIS VG200 | 1360 | ||
| ICF253 | 1300 | ||
| UTM-1001FW | UTM-1001FH | JIS VG200 | 1000 |
| ICF253 | 1000 | ||
| UTM-800FW | UTM-800FH | JIS VG150 | 810 |
| ICF203 | 740 | ||
| UTM-480FW | UTM-480FH | JIS VG150 | 480 |
| ICF203 | 480 | ||
| UTM-350FW | UTM-350FH | JIS VG100 | 350 |
| ICF152 | 350 |
*1 Value measured in accordance with JVIS005 standard, or calculated value based on it
*2 Evacuation speed values are values when protective mesh isn't used.
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