ULVAC VACUUM > Film Thickness Measurement > Quatz Crystal Deposition controller > CRTM-6000G Quartz Crystal Deposition Controller
CRTM-6000G Quartz Crystal Deposition Controller
CRTM-6000G is a quartz crystal deposition controller that can monitor and control deposition film thicknesses and deposition rates with an outstanding resolution. Its compact body (half-rack size) enables low-rate control, and continuous deposition control of multilayer films with up to 99 layers.
- • Low-rate control with outstanding film thickness/rate resolution (0.04 Å).
• Fast sampling rate of 125 ms enables quick-response control.
• Control of multilayer films with up to 99 layers.
• RS-232C interface is provided standard.
• Two single sensors can be connected(selection type).
• Programmable 12ch digital input / output and 3ch analog out put signals.
- • Film thickness and rate control at Evaporation
| Film thickness/rate resolution | 0.04 Å (5 MHz crystal) 0.03 Å (6 MHz crystal) |
| Film thickness display range/display resolution | 0.001kÅ to 999.9kÅ /1Å |
| Deposition rate display range/display resolution | 0.1 to 999.9Å/s / 0.1Å/s |
| Supported sensor frequency | 5MHz, 6MHz |
| Number of sensors that can be attached | 2 |
| Sampling rate | 125ms |
| Number of multilayer film layers supported | 99layers |
| Number of deposition programs | 99 |
| Digital I/O | input : 12channels programmable output : 12channels programmable |
| Analog outputs | 3ch programmable |
| External dimensions (W x D x H; mm) | 240 x 350 x 99 |
