ULVAC VACUUM > Vacuum Gauges > Pirani Gauges > G-TRAN series Atmosphric Pirani Gauge SW1
G-TRAN series Atmosphric Pirani Gauge SW1
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This is a wide range pirani gauge which measures from atmospheric pressure to 5 x 10-2Pa. In addition, this gauge removed control and display panel from traditional controllers, keeping minimum necessary functions only, thus saving cost and space. This gauge has CE marking, and complies with RoHS directive.
- Measures from atmospheric pressure to 5 x 10-2Pa
Atmospheric pressure adjustment and zero point adjustment can be done in one-touch.
Error verification LED equipped
Sensor unit can be replaced easily.
CE marked
- Process control in low vacuum processes such as for semiconductor, optics and electronic parts manufacturing systems.
Process control in low vacuum range processes for industrial equipment such as vacuum furnaces, etc.
Process control for low vacuum system, which requires multiple process chambers, such as in-line sputtering and single wafer processing equipment.
| Name | Standard Type | Serial Communication Type |
| Type | SW1-1 | SW1-2 |
| Compatible Senser Unit | SWP-16 | |
| Measurable Pressure Range Pa |
5 x 10-2 to 1 x 10+5 | |
| Operating Tempereture Range ºC |
10 to 40 | |
| Value Output | DC0V to 10V |
|
| Control Output Signal | ERROR, Set Point1/2 | - |
| LED Display | Power, ERROR, Set Point1/3 |
Power, ERROR |
| Serial Communication Type | - | RS232C / RS485 |
| Power Supply Voltage | DC18-30V , W (4.8W w / power input) | |
| Input / Output Connector | D-sub15 Pin , 2.6 screw | |
| Weight g | 150 (with SWP-16) | |
| Option | Senser | |
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