ULVAC VACUUM
  • ULVAC VACUUM HOME
  • about ULVAC VACUUM
  • Vacuum Pumps
  • Vacuum Gauges
  • Gas Analyzers
  • Leak Detectors
  • Film Thickness Surface Profile Measurement
  • Power Supplies
  • Oters Vacuum Parts

ULVAC VACUUM >  Vacuum Gauges > Pirani Gauges > G-TRAN series Atmosphric Pirani Gauge SW1

G-TRAN series Atmosphric Pirani Gauge SW1

G-TRAN series Atmosphric Pirani Gauge SW1
Catalog Download G-TRAN series Pirani Gauge SW1-1/SW1-2 (1Mb) [PDF]
Adobe Acrobat Reader(Ver.6 or a later version)is required to open PDF files.

This is a wide range pirani gauge which measures from atmospheric pressure to 5 x 10-2Pa. In addition, this gauge removed control and display panel from traditional controllers, keeping minimum necessary functions only, thus saving cost and space. This gauge has CE marking, and complies with RoHS directive.

Features
  • • Measures from atmospheric pressure to 5 x 10-2Pa

    • Atmospheric pressure adjustment and zero point adjustment can be done in one-touch.

    • Error verification LED equipped

    • Sensor unit can be replaced easily.

    • CE marked
Applications
  • • Process control in low vacuum processes such as for semiconductor, optics and electronic parts manufacturing systems.

    • Process control in low vacuum range processes for industrial equipment such as vacuum furnaces, etc.

    • Process control for low vacuum system, which requires multiple process chambers, such as in-line sputtering and single wafer processing equipment.
Specifications
Name Standard Type Serial Communication
Type
Type SW1-1 SW1-2
Compatible Senser Unit SWP-16
Measurable Pressure Range
Pa
5 x 10-2 to 1 x 10+5
Operating Tempereture Range
ºC
10 to 40
Value Output
DC0V to 10V
Control Output Signal ERROR, Set Point1/2 -
LED Display Power, ERROR,
Set Point1/3
Power, ERROR
Serial Communication Type - RS232C / RS485
Power Supply Voltage DC18-30V , W (4.8W w / power input)
Input / Output Connector D-sub15 Pin , 2.6 screw
Weight g 150 (with SWP-16)
Option Senser

CAD data Download

At ULVAC, you can download CAD data (DXF files) for some of our products.(Internet Explorer Ver. 5.5 or newer)
Downloading is only available if you have completed User Registration (free).
Adobe Acrobat Reader (Ver.6 or a later version)is required to open PDF files.
Once we have received your registration, we will send you a password by email.

>> Caution <<
*This download system can be used with the common ID and password for ULVAC's website ulvac.co.jp/eng/.
* If you do not receive your password within 1 hour, please try registering again.
Please note that IDs and passwords are subject to change without notice.
If you are unable to access the download area with an ID and password
that you received in the past, please complete User Registration again to get your updated ID and password.
* Please note that DXF files and PDF files contain Japanese characters. Please also note that, depending on the PC/CAD environment,
files may not open, be displayed or be able to be used correctly.
* Please note that, because the conversion to DXF format is not
fully compatible, there may be problems such as garbled characters or layout misalignments.
* Due to product improvements, CAD data is subject to change without notice.
* ULVAC will not assume any responsibility whatsoever for any direct or indirect damages resulting from the use of this data.

ULVAC VACUUM PRODUCT CATEGORY