ULVAC VACUUM > Gas analyzers > Gas analyzers > Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
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"Qulee" (pronounced as "KLEE"), ULVAC's latest model for residual gas analysis and gas monitor during process, achieves measurement of high accuracy and high resolution even at a high pressure (1 Pa or less), as well as utmost simplicity in handling. Many pieces of feedback from facility engineers in various production lines are reflected in the new product.
- • Display integrated design.
• Simple operation- "One Click" function.
• No differential pumping system required
• Various leak tests are available
• Total pressure measurement
• Qulee QCS Software is included
• CE MARKING
• RoHS Compliance
- • Residual gas analysis in PVD system.
• Gas monitoring of PVD system during processing.
| Item | Qulee CGM | ||
| Model no. | CGM-051 | CGM-052 | |
| Mass Filter Type | Quadrupole | ||
| Mass Range | 1 to 50 amu | Resolution | M/ΔM=1M(10% P.H.) |
| Sensitivity | 0.1uA/Pa | 0.1mA/Pa | |
| Minimum Detectable Partial Pressure | 1x10-7Pa | 1x10-10Pa | |
| Detector Type | Faraday Cup | EM Tube/Faraday Cup | |
| Maximum Operating Pressure | 2Pa | 2Pa(FC) 1x10-2Pa(SEM) |
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| Linearity | less than 1Pa | ||
| Toatal Puresure Function | capable | ||
| One Click function | capable/He/H2O/N2/O2/Any Gas |
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| One Click Leak Test function | capable | ||
| Power Input | DC24V | ||
| Maximum Sensor Operating Temperature | 120ºC | ||
| Maximum Bakeout Temperature (electronics removed) |
250ºC | ||
| Operating Temperature | 10 - 40ºC | ||
| Standard Software | Qulee QCS (Windows 2000/XP/Vista) | ||
| CE MARKING | Compliance | ||
| RoHS | Compliance | ||
