ULVAC VACUUM > Vacuum Pumps > Mechanical Booster Pumps > PRC-A, PMB-C(M)/B Series Mechanical Booster Pumps
PRC-A, PMB-C(M)/B Series Mechanical Booster Pumps
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By using them together with dry pumps, oil rotary vacuum pumps or water-sealed pumps, mechanical booster pumps can increase the evacuation speed in the 1 kPa to 0.1 Pa range, where rough pump evacuation speed drops. The models in the PRC-A Series are the successors to ULVAC's PMB-006C(M), and PMB-012C(M) models. Like the PMB-C(M) Series, they are Roots pumps designed for general-purpose applications, as well as semiconductor and LC manufacturing processes that require a highly clean atmosphere inside and outside the pump. The PMB-C Series is ideal for general-purpose applications and clean applications. The PMB-B Series is ideal for large-capacity evacuation, such as for heat treatment furnaces and melting furnaces.
- • Oil filter
No lubrication oil in casing chamber, enabling stable performance for water vapor or solvent vapor.
• Corrosion resistance
Major components are special surface coating, for high surface hardness and outstanding corrosion resistance. Tufram®-processed components reduce damage and corrosion inside pump. (Special surface coating is only done for the PRC-A / PMB-C(M) Series.)
PMB-CM/PRC-A (effective at achieving faster evacuation) can be started at same time as rough pump driven by atmospheric pressure, enabling faster evacuation than standard type.
• Evacuation direction can be selected (PMB-024C(M), 040B, 060B).
Vertical or horizontal evacuation direction can be selected, for more compact systems with greater design freedom.
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model
Item |
PMB- 001C, CM |
PMB- 003C, CM |
PRC- 003A |
PRC- 006A |
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| Effective evacuation speed (m3/h(L/min)) (*1) |
50Hz | 95 (1580) |
280 (4670) |
280 (4670) |
500 (8330) |
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| 60Hz | 115 (1920) |
330 (5500) |
330 (5500) |
600 (10000) |
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| Maximum intake pressure (Pa; PMB-C only)(*2) |
50Hz | 9.3 x 103 | 1.2 x 103 | 1.3 x 103 | ||
| 60Hz | 6.2 x 103 | 9.3 x 103 | 1.1 x 103 | |||
| Maximum permitted pressure difference (Pa; PMB-C only)(*2) |
50Hz | 8.0 x 103 | 4.0 x 103 | 7.3 x 103 | ||
| 60Hz | 5.6 x 103 | 3.3 x 103 | 6.0 x 103 | |||
| Final pressure (Pa) (*3) | 4.0 x 10-1 | |||||
| Supported drive pressure (Pa) (*4) |
to 1.0 x 105 (PRC-A,PMB-CM) | |||||
| Motor power (kW) (number of poles) (*5) |
0.4(2) | 0.75(2) | 2.2(2) | |||
| Oil (*6) | ULVOIL R-4 | |||||
| Required oil amount (L) (*7) |
0.35 | 0.7 | 1.5 | |||
| Cooling water | Cooling method | Air-cooled | Air-cooled, water-cooled | Water-cooled | ||
| Primary pressure (MPa) |
- | 0.3 | ||||
| Outlet/inlet differential pressure (MPa) |
- | 0.05 | 0.01 | |||
| Flow rate (l/min) |
- | 2 | ||||
| Temperature (ºC) |
- | 5 to 30 | ||||
| Intake size (JIS B 2290) |
VG50 size | VG80 size | VG100 size | |||
| Vent size (JIS B 2290) |
VF50 size | VF80 size | ||||
| External dimensions (L x W x H; mm) |
271 x 580 x 180 | 290 x 656 x 260 | 296 x 565 x 260 | 356 x 619 x 320 | ||
| Weight (kg) (*8) | 23(24) | 46(48) | 51(54) | 86(90) | ||
| Standard auxiliary pump |
VD401 | VD601 | VD901 | |||
| Options | - | 1.5 kW motors (2) | Atmospheric pressure drive type |
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| Lubrication chamber evacuation support |
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| Model
Item |
PRC- 012A |
PMB- 024C,CM |
PMB- 040B |
PMB- 060B |
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| Effective evacuation speed (m3/h (l/min)) (*1) |
50Hz | 1000 (16700) |
2000 (33300) |
3800 (63300) |
6200 (103300) |
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| 60Hz | 1200 (20000) |
2400 (40000) |
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| Maximum intake pressure (Pa; PMB-C only) (*2) |
50Hz | 1.3 x 103 | 8.0 x 102 | 1.3 x 103 (5 minutes or less at startup) 8.0 x 102 (during continuous operation) |
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| 60Hz | 1.1 x 103 | 6.7 x 102 | ||||
| Maximum permitted pressure difference (Pa; PMB-C only) (*2) | 50Hz | 7.3 x 103 | 5.6 x 103 | - | - | |
| 60Hz | 6.0 x 103 | 4.7 x 103 | ||||
| Final pressure (Pa) (*3) | 6.7 x 10-1 | |||||
| Supported drive pressure (Pa) (*4) | to 1.0 x 105 (PRC-A,PMB-CM) | |||||
| Motor power (kW) (number of poles) (*5) | 3.7(2) | 7.5(2) | 15(4) | 18.5(4) | ||
| Oil (*6) | ULVOIL R-4 | |||||
| Required oil amount (L) (*7) | 1.9 | 4.5(2.8) | 6.5 | |||
| Cooling water | Cooling method | Water-cooled | ||||
| Primary pressure (MPa) | 0.3 | 0.1 to 0.2 | ||||
| Outlet/inlet differential pressure (MPa) | 0.01 | 0.05 | ||||
| Flow rate (l/min) | 3 | 24 | ||||
| Temperature (ºC) | 5 to 30 | |||||
| Intake size (JIS B 2290) | VG100 size | VG200 size | VG250 size | VG300 size | ||
| Vent size (JIS B 2290) | VF80 size | VF200 size | VF150 size | VF200 size | ||
| External dimensions (L x W x H; mm) | 406 x 759 x 340 | 540 x 1237 x 470 | 764 x 1230 x 707 | 764 x 1470 x 707 | ||
| Weight (kg) (*8) (*9) | 118(123) | 260(272) | 950 (without motor) |
1150 (without motor) |
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| Standard auxiliary pump | VS1501 | PKS-070 | PKS-070 x 2 | |||
| Options | Atmospheric pressure drive type | 11 kW motors (2) | Bypass valve, piping | |||
| Lubrication chamber evacuation support | - | - | ||||
Note : This catalog uses SI measurement units. Conversion to non-SI units is as follows :
Final pressure : 4.0 x 10-1 Pa = 3.0 x 10-3 torr
Pressure: 0.05/0.1/0.2/0.3 MPa = 0.5/1/2/3 kgf/cm2
*1 Measured value at 13 Pa
*2 With optional large-capacity motor, the intake pressure and pressure difference can be increased.
*3 Measured by Pirani vacuum gauge (standard auxiliary pump and oil).
4.0 x 10-2 Pa with MacLeod vacuum gauge
*4 For PMB-024CM, set the repeated evacuation time for air/vacuum (›655 Pa) to no more than 5 minutes,
and the interval to the next evacuation process to at least 5 minutes.
*5 200 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase
*6 Pump oil types other than the standard type are available. Contact ULVAC.
*7 Oil volume values in parentheses ( ): For models performing evacuation in horizontal direction
*8 W = width, D = depth, H = height
*9 Weight values in parentheses ( ): Values for CM models
PRC Series models are not available as explosion-proof types or increased safety types.
