ULVAC VACUUM > Vacuum Pumps > Dry Pumps > Dry Pumps LR/HR Series
Dry Pumps LR/HR Series
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Effective utilization of compressed heat which is own high temperature uniformity technology has given this dry pump series a high durability in the hard processes of CVD, etching etc. In the light processes, approximately up to 70% of electric power consumption reduction is possible by having the ECHO-SHOCK on the pump. CE marking is available for all series (optional).
- • LR series: Uniformity of low temperature distribution. The optimum pump for the evacuation of LL chamber, in addition to the PVD processes, in which reduction of exhaust time is important to up the throughput.
• HR series: Uniformity of high temperature distribution. It is possible to exhaust the sublimates generated by CVD and etching processes in a gaseous state.
• Noise reduction PDR-180C: 74dB > LR180: 68.5dB
• Pump withstands power interruptions of up to 500ms duration.
• CE marking is available upon request.
- • Evacuation of activated gas (CVD and etching, etc)
• Evacuation of inert gas (PVD, evaporation, heat treatment processes, etc)
• Reduction of exhaust time for LL chamber (LR series)
• Evacuation of gases on the process which generate powders (Si crystal growing furnaces, etc)
• Backing pump for turbo-molecular pumps, mechanical booster pumps, etc
| Model/Spec | LR/ HR 60 |
LR/ HR 90 |
LR 180 |
LR/ HR 300 |
LR/ HR 600 |
LR/ HR 1200 |
LR 1800 |
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| Booster Pump |
- | PRC-003A | PRC-006A | PRC-012A | PRC-018A | |||
| Dry Pump | LR/ HR 60 |
LR/ HR 90 |
LR 180 |
LR/ HR 60 |
LR/ HR 90 |
LR/ HR 90 |
LR 180 |
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| Maximum pumping speed m3/hr (L/min) |
50Hz | 62 (10 30) |
112 (18 60) |
183 (31 00) |
359 (59 80) |
653 (109 00) |
1012 (169 00) |
1701 (283 50) |
| 60Hz | 80 (13 33) |
126 (21 00) |
237 (39 50) |
365 (60 80) |
701 (117 00) |
1051 (175 00) |
1784 (297 00) |
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| Maximum inlet pressure (Pa) |
Atmospheric pressure (*2) | |||||||
| Ultimate pressure (Pa) |
5 | 0.67 | ||||||
| Maximum exhaust pressure |
1Pa to Atmospheric pressure | |||||||
| Inlet diameter (*1) | VG 50 |
VG 80 |
VG 80 |
VG 80 |
VG 80 |
VG 100 |
VG 150 |
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| Outlet diameter | NW40 | |||||||
| Lubricating oil, Grease | PRC | - | FOMBLIN YL VAC 14/6 BARRIERTA J60F |
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| - | - | - | 0.7L | 1.5L | 1.9L | 1.9L | ||
| LR/ HR |
FORBLIN YL VAC 25/6 BARIERTA J100F |
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| 0.5L | 0.9L | 1.5L | 0.5L | 0.9L | 0.9L | 1.5L | ||
| BARIERTA JFE552HV | ||||||||
| 23.8 g |
30.0 g |
37.4 g |
23.8 g |
30.0 g |
30.0 g |
37.4 g |
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| Weight (kg) | 180 kg |
245 kg |
335 kg |
275 kg |
370 kg |
420 kg |
545 kg |
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| *1: | With the HR300,HR600 and HR1200,do not allow the repeated pumping operation at the suction pressure more than 200Pa. There is possibility pump temperature will exceed the upper limit of the setting point and the interlock will run. |
| *2: | The standard suction port flange is JIS flanging flange will be suction port flange in the case of CE marking. NW flange is available as the option even CE marking is not required. |
Utility Requirements |
| Power | Spec | AC200V 50/60Hz, AC220V 60Hz 3phase |
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| Model | LR/ HR 60 |
LR/ HR 90 |
LR 180 |
LR/ HR 300 |
LR/ HR 600 |
LR/ HR 1200 |
LR 1800 |
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| Motor power (kW) |
Booster Pump | - | - | - | 0.75 | 2.2 | 3.7 | 5.5 | |
| Dry pump | 2.2 | 3.7 | 5.5 | 2.2 | 3.7 | 3.7 | 5.5 | ||
| Breaker (A) |
Booster Pump | - | - | - | 7 | 16 | 25 | 32 | |
| Dry pump | 16 | 25 | 32 | 16 | 25 | 25 | 32 | ||
| Current (A) |
at maxi mum load |
7.0/ 7.3 |
11.8 | 20.6 | 9.6/ 8.1 |
19.0/ 13.8 |
24.2/ 18.9 |
39.8 | |
| at ultimate vacuum pressure. |
6.9/ 7.1 |
11.2 | 18.9 | 7.0/ 7.8 |
12.3/ 12.9 |
13.7/ 15.4 |
21.4 | ||
| Cooling water | Supply pressure (MPa) | 0.1 to 0.3 MPa | |||||||
| In/out difference pressure (MPa) |
0.1 MPa < | ||||||||
| Flow rate (L/min) | 5.0 L/min < | ||||||||
| Supply water temperature (°C) |
10 to 30°C (*1) | ||||||||
| Nitrogen gas | Supply pressur e (MPa gauge pressure) |
0.1 to 0.5 MPa | |||||||
| Regulated pressure (MPa gauge pressure) |
0.05 MPa (Regulated pressure in pump) |
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| Flow rate(SLM) | Shaft seal | 5 SLM | |||||||
| Gas ballast | 0 to 45 SLM | ||||||||
*1: Not condensing. |
Comparison Chart LR/HR |
| Model | LR | HR |
| Temperature of pump inside | Uniform temperatures at low temperature | Uniform temperatures at high tempperature |
| Coafing | Special surface coating | |
| Heating kit for rear pipe for chemical corrosion | none | standard |
