Dry Pumps LR / HR Series
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Effective utilization of compressed heat which is own high temperature uniformity technology has given this dry pump series a high durability in the hard processes of CVD, etching etc. In the light processes, approximately up to 70% of electric power consumption reduction is possible by having the ECHO-SHOCK on the pump. CE marking is available for all series (optional).
Features
Applications
Specifications
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CAD data Download
At ULVAC, you can download CAD data (DXF files) for some of our products.(Internet Explorer Ver. 5.5 or newer) Downloading is only available if you have completed User Registration (free).
Adobe Acrobat Reader (Ver.6 or a later version)is required to open PDF files.
Once we have received your registration, we will send you a password by email.
I / O data Download
At ULVAC, you can download CAD data (DXF files) for some of our products.(Internet Explorer Ver. 5.5 or newer) Downloading is only available if you have completed User Registration (free).
Adobe Acrobat Reader (Ver.6 or a later version)is required to open PDF files.
Once we have received your registration, we will send you a password by email.
