ULVAC VACUUM > Vacuum Pumps > Dry Pumps > ER Series Energy-Saving Dry Pumps

ER Series Energy-Saving Dry Pumps

The ER Series is the latest addition to ULVAC's PDR-C Series, popular for SiN-LPCVD, metal etching and other harsh processes generating sublimated substances. The ER Series is for process applications such as sputter, ashing, and etching requiring corrosion resistance. The ER Series are the most energy-saving models in the industry, using brushless DC motors and optimizing the capacity of each evacuation stage.

• Power consumption : Up to 58% lower than previous ULVAC models

• N₂ consumption reduction : Can be operated with OSLM N₂ purge(for clean evacuation applications).

• Outstanding corrosion resistance

• CVD and etching with no generation of sublimated substances

• Sputter and loading / unloading chambers

• Turbomolecular pump and other auxiliary evacuation pumps

Model/specification		ER80	ER150	ER400	ER600	ER1200
Effective maximum evacuation speed	(m³/h)	80	150	390	600	1140
	(L/min)	1330	2500	6500	10000	19000
Final pressure (Pa) (*1)		2		0.67
Cooling water	Connection port	Rc3 8, internal thread
	Pressure	Differential pressure : 0.1 MPa; Supply pressure : 0.1 to 0.5 MPa
	Flow rate	3 L/min or more.
	Temperature	10 to 30ºC
Nitrogen	Connection port	1/4-inch tube coupling (Swagelok type) Connectable tube : 6.35 mm outer diameter
	Pressure (gauge pressure)	Supply pressure : 0.1 to 0.5 MPa; Regulator set pressure : 0.05 to 0.1 MPa
	N₂ purge gas	0 to 50 SLM
Phase, voltage (frequency)		3-phase, 200 VAC (50/60 Hz) ; 220 VAC (60 Hz)
Rated current (A) (at final pressure)		7.2	10.0	16.7	19.2	24.5
		(4.0)	(6.0)	(6.0)	(9.4)	(11.4)
Intake size		NW40	NW50	NW80		NW100
Vent size		NW40
External dimensions (W x D x H; mm)		873 x 383 x 490	923 x 383 x 490	873 x 383 x 768	873 x 383 x 828	923 x 423 x 856
Weight (kg)		167	172	230	265	305
Power consumption at final pressure (kW)		1.26	1.4	1.6	1.8	2.1
Noise value (dB(A))		57	57	58	59	59

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